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Strasbaugh 6DS-SP - Page 770

Strasbaugh 6DS-SP
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Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 79
ROBOT ARM ROTATION (THETA)
CALIBRATION
[#5 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES]
Notes:
The variables for the send and receive cassette stations are simply set to rotate
the robot to a right angle to the linear robot axis. If the zero (home) position
is exactly lined up with this axis, the rotations will be exactly 90 degrees.
The nominal values shown in the table below can be used for the load stations
which do not require an exact rotation position.

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