Strasbaugh 6DS-SP - Page 789

Maintenance Model 6DS-SP Planarizer
10 - 98 Version 4.0 - February 1998
D. CHECK THE CURRENT CALIBRATION
1. At Page 1 of the Manual Control Menu, select Robot Move and choose
Left Load to move the robot to its left load position.
2. Select Robot Up/Down Move and choose Above Load to move the
robot Z-axis to its above load position.
3. Select Robot Arms Move and choose Left Load to move the robot arm
to left load position, extending the arm out over the left load station.
4. Select Robot Up/Down Move and choose Left Load to move the robot
Z-axis to its left load position.
5. Evaluate the position of the robot arm:
ALIGNMENT
GOAL AT LOAD
STATIONS:
The wafer must be centered within the centering
ring of the load station both
• linearly (side to side)
and
• radially (in and out).
a. If the robot arm position meets the goal, skip to When a Satisfactory
Adjustment Is Achieved, below in this section.
b. If the arm position does not meet the goal, proceed to Adjustment
Procedure, immediately below, to correct the positioning.