Maintenance Model 6DS-SP Planarizer
10 - 108 Version 4.0 - February 1998
ROBOT UP/DOWN LEFT LOAD POSITION
A. BEFORE YOU BEGIN
Tools Required
• precision scale (accurate to .03125 in.)
• test wafer
Turn Machine Power On, Perform Home Sequence Routine, and Install Carriers
on Spindles
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. CHECK CURRENT CALIBRATION
1. At Page 1 of the Manual Control Menu, select Bridge Move and choose
Pol Tbl 1 to move the bridge to polish position.
2. Select Robot Move and choose Left Load to move the robot to the left
load station.
3. Select Robot Up/Dn Move and choose Above Load to move the robot
Z-axis to its above load position.
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