Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 109
4. Select End Effector On/Off and choose On to turn robot end effector
vacuum "on".
5. Manually hold a test wafer under the robot arm end effector vacuum
chuck until the wafer takes vacuum.
6. Select Robot Arms Move and choose Left Load to move the robot arm
to its extended position out over the left load station.
(Right Load Station: Choose Right Load.)
7. Select Robot Up/Dn Move and choose Left Load to move the robot Z-
axis to its left load position.
(Right Load Station: Choose Right Load.)
8. Select Left Load Chuck Up/Down and choose Up to move the load
chuck to its up position.
9. Evaluate the position of the wafer:
GOAL FOR SINGLE TABLE
MACHINES:
There should be no light gap between
the load chuck and the wafer
and
the wafer should rest lightly on the
chuck without lifting the end effector
vacuum chuck up out of the robot arm.
GOAL FOR TWO TABLE
MACHINES:
Of three equidistant points around the
load chuck, the wafer should be resting
on all three.
a. If the wafer position meets the goal, no adjustment is necessary. Go
on to the Robot Up/Down Right Load Position procedure below.
b. If the wafer position does not meet the goal, make the needed
adjustment by following the steps in the Adjustment Procedure
section below.
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