Maintenance Model 6DS-SP Planarizer
10 - 112 Version 4.0 - February 1998
Turn Machine Power On, Perform Home Sequence Routine, and Install Carriers
on Spindles
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. ADJUSTMENT PROCEDURE
1. At Page 1 of the Manual Control Menu, select Bridge Move and choose
Pol Tbl 1 to move the bridge to polish position.
2. Select Robot Move and choose Right Send to move the robot to the
right send position.
3. Remove the robot cover located on the end of the robot facing the
elevator section doors:
a. Using a 7/64-in. hex key, remove the four 6-32 socket head
capscrews by rotating them counterclockwise.
b. While observing and noting its orientation for replacement later, lift
off the cover.
c. Set the cover aside.
4. Select End Effector On/Off and choose On to turn robot end effector
vacuum "on".
5. With no wafer on the end effector, read and record the vacuum switch
reading:
a. Find the switch display, located at the upper left corner of the robot
side facing the elevator doors.
b. Using two mirrors, read and record the vacuum switch reading:
Value With No Wafer Present: _____ (Example: - 4.4)
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