Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 111
ROBOT VACUUM SWITCH WAFER
SENSING CALIBRATION
[#8 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES]
The RTZ robot uses a vacuum switch for wafer sensing instead of the air sensor
used in the two arm robot. The vacuum switch monitors the robot's end effector
vacuum. The vacuum switch turns "off" when a wafer is present (maximum
vacuum developed). The switch turns "on" when a wafer is absent (minimum
vacuum).
Note: It may be easiest to use two mirrors to view the vacuum switch display.
If using one mirror, be sure to consider the mirror's reversed image to
avoid confusing 2's and 5's. (Digital display 2's and 5's look alike when
reversed.) Also, take care not to transpose digits. (Digits will be
swapped in the mirror image.)
A. BEFORE YOU BEGIN
Tools Required
• 7/64-in. hex key
• two small mirrors
• test wafer
To Next Page
Loading...
