Maintenance Model 6DS-SP Planarizer
10 - 114 Version 4.0 - February 1998
14. Using the Up and Down Arrows, display a value 0.2 psi more negative
than the AVERAGE value.
For example, if the P1 value was set to -7.2 psi, enter -7.4
(- 7.2 - 0.2 = - 7.4).
15. Press "SET" to select "P3".
16. Using the Up and Down Arrows, enter "00".
17. Press "SET" to select "P4".
18. Using the Up and Down Arrows, enter "00".
19. Press and release "SET" to return display to the normal display of
current vacuum.
20. While observing the green LED on the switch (the red LED has no
application) place and remove a wafer on the end effector.
The results should be:
Wafer present - LED off
Wafer absent - LED on
21. At the Manual Control Menu, select End Effector On/Off and choose
Off to turn robot end effector vacuum off.
22. Replace the cover plate.
23. Replace the four capscrews.
24. Go on to Testing Robot Calibration Adjustments - Running a Short
Cycle to Observe Wafer Handling [#9 in Elevators and Robot
Adjustment Series], below.
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