Strasbaugh 6DS-SP - Page 806

Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 115
TESTING ELEVATOR AND
ROBOT CALIBRATION
ADJUSTMENTS - RUNNING A
SHORT CYCLE TO OBSERVE
WAFER HANDLING
[#9 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES]
To run a cycle to test wafer handling, set the polish times for both spindles to 0.
A. BEFORE YOU BEGIN
Tools Required
• 50 test wafers