Maintenance Model 6DS-SP Planarizer
10 - 130 Version 4.0 - February 1998
PART II
A. PLUG THE BACK PRESSURE OUTLETS AT THE SPINDLES
1. Open the electrical cabinet doors and pull out the door interlock contact
plunger to maintain power with the doors open.
2. Remove the left front service door and pull out the door interlock
contact plunger to maintain power with the door open.
3. Rehome the machine.
4. Load the carriers.
5. At Page 1 of the Manual Control Menu, select Bridge Move and choose
Pol Tbl 1 to move the bridge to polish position.
6. Manually place a test wafer on each carrier:
a. Wet a wafer.
b. Hold the wafer underneath the carrier until it takes vacuum.
7. At the Diagnostics Menu, select Change Counter and enter 12 to choose
Left Spindle E-P Regulator.
8. Gently lower the left spindle by entering a value of 1200 for counter 12.
9. Select Change Counter and enter 13 to choose Right Spindle E-P
Regulator.
10. Gently lower the right spindle by entering a value of 1200 for counter
13.
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