Strasbaugh 6DS-SP - Page 824

Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 133
C. TEST LEFT VERSUS RIGHT PERFORMANCE
1. At the Diagnostics Menu, select Toggle Output and enter 8 to turn
Output 8 (Left Wafer Carrier Blow Off) ON, enabling backpressure.
2. Select Toggle Output and enter 10 to turn Output 10 (Right Wafer
Carrier Blow Off) ON, enabling backpressure.
3. Select Change Counter and enter a value of 0 for counter 55.
4. Select Change Counter and enter a value of 0 for counter 56.
5. Read the current left and right spindle back pressure values displayed in
the screen status area:
For Back Pressure Displayed In Psia
SPNDL left right
Frc .0
BkPr 4.7 4.8 psia
Spd.0
Load .0
Example:
BkPr 4.7 4.8 psia
For Back Pressure Displayed In Psig
SPNDL left right
Frc .0
BkPr -11.2 -11.1 psig
Spd.0
Load .0
Example:
BkPr -11.2 -11.1 psig
6. Compare the left and right back pressure status screen values:
GOAL: The status screen readings for left and right spindle
backpressure should be within +/- 0.3 psi of equal.
7. At the Diagnostics Menu, select Change Counter and enter a value of
2000 for counter 55.