Strasbaugh 6DS-SP - Page 826

Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 135
DOWN FORCE E - P REGULATOR
CALIBRATION
Notes:
• This procedure calibrates the spindle down force E-P regulators. Thus,
after the steps below are performed, any labels on placed on the
regulators by the manufacturer will no longer be valid.
• As considerable spindle force will be applied, this procedure will
probably damage the pad.
A. BEFORE YOU BEGIN
Tools Required
• small flat blade screwdriver
• 100-LB pressure gauge with 2 four-inch pieces of hose and a
T fitting attached
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.