Maintenance Model 6DS-SP Planarizer
11 - 4 Version 4.0 - February 1998
CLEANING STATIONS
CLEANING STATIONS ADJUSTMENT
SERIES--ORDER OF ADJUSTMENT
When adjusting the cleaning stations, be sure to follow the order shown below
for performing the mechanical and pneumatic adjustments and software
calibration procedures.
Note: Procedures are grouped in each chapter by component.
Order Procedure
Location In
Maintenance
Manual
1 Cleaning Station Alignment Chapter 9 - Mechanical
Maintenance
Procedures
2 Cleaning Station Device Up/Down Adjustments Chapter 11- Pneumatic
Adjustments
3 Enhanced Cleaning Station Rotational Speed
(Potentiometer) Calibration
Chapter 10 - Software
Calibration Procedures
4 Cleaning Station Pad Pressure Adjustments Chapter 11 - Pneumatic
Adjustments (of this
manual) AND
Chapter 3 - Operator
Functions of the
6DS-SP Operations
manual
Note: This procedure is
repeated in the
Operations manual
because it provides
process settings used to
obtain optimal cleaning
results.
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