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Strasbaugh 6DS-SP - Page 884

Strasbaugh 6DS-SP
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Maintenance Model 6DS-SP Planarizer
11 - 22 Version 4.0 - February 1998
15. Retest the motion by repeating Section B., above.
GOAL: The load chuck should travel down slowly and
smoothly.
a. If the goal is met, the adjustment is complete.
b. If the goal is not met, repeat turning the Solenoid 4 down flow
control regulator knob in 1-turn increments clockwise and testing
until the goal is met.
(Solenoid 6 = right load chuck)
RIGHT LOAD CHUCK RAISE PRESSURE
Repeat as for left load chuck, making the appropriate substitutions as shown in
the text above.

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