Strasbaugh 6DS-SP - Page 926

Maintenance Model 6DS-SP Planarizer
13 - 14 Version 4.0 - February 1998
CYCLE WON’T START--PART A
Problem
Indicator
Problem
Location
Component/ Cause Resolution/
Responsibility
NO RESPONSE
TO PRESSING
CYCLE START
BUTTON
No robot
movement; no
machine
movement
(1) Doors not
closed.
(2) No cassette on
send elevator.
(3) Cassette sensor
arm not down.
(4) Machine not
homed.
(5) Wafer on load
station (perhaps
from previously
halted cycle).
(6) No carriers
installed.
(7) Wafer left on
carrier.
(8) Robot holding
wafer (perhaps
from previously
halted cycle).
(1a) Check and close
all doors.
(2a) Place loaded
cassette on send
elevator.
(3a) Place cassette
sensor arm in down
position on cassette.
(4a) Perform home
sequence.
(5a) Remove wafer and
restart.
(6a) Install carriers.
(7a) Remove wafer and
restart.
(8a) Carefully remove
wafer (see instructions
for Safe Removal Of
Wafer in Operator
Functions chapter of
Operations manual.)
OPERATIONS