Strasbaugh 6DS-SP - Page 930

Maintenance Model 6DS-SP Planarizer
13 - 18 Version 4.0 - February 1998
MACHINE HALTS DURING CYCLE WITH POWER
STILL ON BUT MOTION SUSPENDED - PART B
Problem
Indicator
Problem
Location
Component/ Cause Resolution/
Responsibility
MACHINE
LIGHTS AND
SCREEN
DISPLAY ON
BUT MACHINE
MOTION
STOPS
Interior of
machine
(2) Cycle
terminated by:
The Abort/Reset
key (F10) was hit
twice.
(2a If robot is holding
wafer, carefully
remove wafer. (See
Procedures For Safe
Removal Of Wafer
From Robot in
Operator Functions
chapter of Operations
manual.)
(2b) Return to the
Auto Polish Menu and
begin a new cycle.
OPERATIONS