Strasbaugh 6DS-SP - Page 933

Strasbaugh Troubleshooting
Version 4.0 - February 1998 13 - 21
WAFERS LEFT ON TABLE - PART A
Problem
Indicator
Problem
Location
Component/ Cause Resolution/
Responsibility
WAFERS LEFT
ON TABLE AT
END OF AUTO
CYCLE
Table
(1) Inadequate
vacuum.
(2) Inserts not wet
enough.
(3) Inserts and
wafer pads need
replacement.
(1a) Check and restore
facility vacuum supply
to installation
specification.
(2a) Press the EMERG
OFF button.
(2b) Remove wafers.
(2c) Wet with sprayer
carefully before
running next cycle.
(3a) Replace ring and
wafer pads.
OPERATIONS