Maintenance Model 6DS-SP Planarizer
13 - 40 Version 4.0 - February 1998
“LEFT SPINDLE VACUUM SWITCH OFF” - # 51
“RIGHT SPINDLE VACUUM SWITCH OFF” - # 52
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Carrier not
installed.
or
(2) Mismatch
between the setting
at Machine
Parameters menu
and carrier(s)
installed.
(3) Vacuum switch
error.
(1a) Install carrier for
affected spindle.
(2a) Change parameter
2 (Active Carriers) at
the Machine
Parameters menu to
match the carriers
installed (Left, Right,
or Both).
OPERATIONS
(3a) If the problem still
persists, adjust the
spindle vacuum switch.
MAINTENANCE
Notes on Bridge Shutoffs Due to Low Sensed Spindle Vacuum:
The following scenario will cause a bridge “following error” even though
there is nothing wrong with the servo system.
1. The bridge is attempting to move.
2. A spindle vacuum switch is off even through the spindle vacuum is
on.
(The cause would probably be a misadjusted vacuum switch or low
supply vacuum.)
3. The software thinks it has lost a carrier and disables the bridge
amplifier.