Strasbaugh 6DS-SP - Page 958

Maintenance Model 6DS-SP Planarizer
13 - 46 Version 4.0 - February 1998
“ROBOT UP/DOWN AXIS NOT HOMED” - # 66
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Robot Z not
homed.
(1a) Rehome Axis 12 at
the Servo Initialization
menu.
OPERATIONS
“WAFER FOUND ON ROBOT” - # 67
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Wafer on the
robot.
(1a) Manually remove
the wafer and restart.
(2a) If problem
persists, check robot
end effector vacuum
switch.
OPERATIONS
“BRIDGE TRAVEL NOT HOMED” - # 68
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Bridge not
homed.
(1a) Rehome Axis 3 at
the Servo Initialization
menu.
OPERATIONS