Contents - 3
Figures and Tables
Fig. 1 Dimensional drawing of G-101D oil sealed rotary vacuum pump ·········· 5
Fig. 2 Dimensional drawing of G-101S oil sealed rotary vacuum pump ·········· 5
Fig. 3 Transportation method of the oil sealed rotary vacuum pump ············ 6
Fig. 4 Lubrication of the oil sealed rotary vacuum pump ······················ 7
Fig. 5 Basic piping diagram to the vacuum chamber ·························· 8
Fig. 6 Electric wiring diagram ··························· 9
Fig. 7 Change region of the voltage and frequency ·························· 11
Fig. 8 Pumping speed curve ·························· 19
Fig. 9 Replacement of the coupling ·························· 24
Fig.10 Disassembly drawing of G-101D oil sealed rotary vacuum pump ·········· 30
Fig.11 Disassembly drawing of G-101S oil sealed rotary vacuum pump ·········· 31
Table 1 Pump specification ·························· 3
Table 2 Motor specification ·························· 4
Table 3 Characteristics of the thermal protector ·························· 15
Table 4 Periodic inspection table ·························· 21
Table 5 Trouble check list ·························· 25
Table 6 G-101D Maintenance parts list ·························· 28
Table 7 G-101S Maintenance parts list ·························· 29
Attached table: Safety Data Sheet (SDS)
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