Ulvac G-101D - 8.1 Maintenance Parts List (G-101 S)

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Table 7 G-101S Maintenance parts list
Product name No.
Parts name
O’ty
11
Outlet valve
3
12
Outlet valve spring
3
41 O-ring_S-4 1
42 O-ring_S-6 1
43 O-ring_S-18 2
44 O-ring_S-24 1
45 O-ring_S-55 1
46 O-ring_P-8 1
48 O-ring_P-24 1
49 O-ring_V-160 1
50 Oil seal_HTC-17-40-9 1
51 Oil seal_SCY-17-30-7 1
52 Oil seal_VC-15-30-5 1
G-101S
Maintenance kit A
79
O-ring_P-20 1
6 Vane 2
7 Vane spring 4
8 Middle pin 2
31 Oil level gauge 1
34
Coupling φ14×φ16
1
39 Bearing _6203 1
G-101S
Maintenance kit B
40 Bearing _6002 1
Note : For the relationship between components, see the disassembly drawing.