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Ulvac PVD-180 - Page 9

Ulvac PVD-180
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SK00-4167-DI-002-07
5
2 Performance specifications
Table 3 Performance specifications
Type
Description
PVD-180
PVD-180B *2
PVD-360
PVD-360B *2
Designed pumping speed
m
3
/hrL/min
50Hz 9155 19310
60Hz 11186 22372
Ultimate pressure *1
Pa
GV Closed 0.67
GV Opened 6.7
Motor kW (Number of Poles) 0.4 (4) 0.75 (4)
Pump revolution
rpm
50Hz 500
60Hz 600
Maximum water vapor capacity g/hr 100
Oil ULVOIL R-72
Oil capacity
L
Standard 0.3 0.5
Z Specifications 1.5 1.7
Cooling method Air cooled
Inlet tube (O.D.× I.D.) φ28×φ19 φ34×φ27
Outlet cap mounting screw G3/4 (PF3/4) G1 (PF1)
Weight (without motor) kg 33.5 43
External dimensions WxDxH mm 238×470×321 273×500×321
Recommended oil mist trapOptional TMX-1
Options
Oil mist trap, RF, explosion-resistant motor
Special application( Spec. K, H and Z )
*1 Measured with a Pirani gauge. (Approx. 6.7X10
-2
Pa when measured with a McLeod vacuum gauge.)
*2 The pump of this type, PVD-180B and 360B have following specific features in comparison with the
standard type, PVD-180, -360.
1) The pump [Type: PVD-180B or 360B] has a solenoid valve called Vac. Lock Valve (means Anti
Suck Back), when the pump stops the valve shuts off incoming oil and air and keeps a good vacuum
for a long period of time.
2)While the pump is running, the valve is open and appropriate amount of oil is supplied into the cylinder.
Please note the contents of "-4 Electrical connections" and "Operation" for the running of PVD-
180B or PVD-360B.
Recommended type of oil:
(1) ULVOIL R-72 (standard oil)
(2) ULVOIL R-42 (For cold district in winter. In the case of ambient temperature 4~10)

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