Chapter 7. SPECIFICATIONS
37
■ General specifications
Characteristics in this table are under the standard conditions shown below, unless
otherwise specified.
• Operating environment: Standard (see page 39)
• Measured gas: Air
• Pressure: 0.3 ±0.025 MPa
• Flow rate value: Converted to 0 °C, 101.325 kPa (abs)
• Settings: Factory defaults
• Warm-up time: 30 minutes after power on
*: FS flow rate indicater full scale flow rate.
Notes: 1.The indication resolution shows the smallest displayable digit, regardless of the position of the decimal point
or the flow rate units.
2.Horizontal piping with the display facing right as seen from the air inlet.
3.Horizontal piping with the display facing left as seen from the air inlet.
4.Measuring accuracy becomes ±5 %FS ±1 digit after the measurement module is reassembled.
5.The measuring accuracy becomes ±5 %FS ±1 digit after the measurement module is replaced with a new
one. (For MCF0250, MCF0400 and MCF0500)
Item MCF0080 MCF0150 MCF0151 MCF0250 MCF0400 MCF0500
Measured gas Air, N2. Gas must be dry and not contain corrosive components such as chlorine, sulfur
and acid. Gas must be a clean, without dust or oil mist.
Full scale (FS) flow rate 200 500 1000 3000 6000 12000
[L/min]
Minimum sensitivity [L/min] 2 5 10 30 60 120
Indication
Instantaneous
112 51010
resolution flow rate
[L/min] Integrated 10 10 10 10 100 100
(Note 1)
flow
Maximum [L/min]
-60 to +400 -150 to +1000 -300 to +2000 -900 to +6000 -1800 to +12000 -3600 to +24000
display [m
3
/h]
-3.6 to +24.0 -9.0 to +60.0 -18.0 to +120.0 -54.0 to +360 -108.0 to +720.0 -220.0 to +1440.0
range [m
3
/min]
-0.060 to +0.400 -0.150 to +1.000 -0.300 to +2.000 -0.900 to +6.000 -1.800 to +12.000 -3.600 to +24.000
[kg/h]
-4.7 to +31.0 -11.6 to +77.6 -23.2 to +155.2 -70 to +465.5 -140.0 to +931.0 -279.0 to +1862.0
Indication accuracy for ±3 %FS ±1 digit (except 2 % or less of FS flow rate)
(Note 4, 5)
instantaneous flow rate
Indication repeatability for
±1 %FS ±1 digit (2 to 100 % of FS flow rate)
instantaneous flow rate
Temperature characteristics ±0.15 %FS / °C ±1 digit or less
Pressure Operating -0.25 %FS / 0.1 MPa
±1 digit or less (2 to 40 % of FS flow rate)
characteristics pressure -0.55 %FS / 0.1 MPa
±1 digit or less (40 to 100 % of FS flow rate)
for 0 to 1 MPa
instantaneous Operating
±0.25 %FS / 0.01 MPa ±1 digit or less (2 to 40 % of FS flow rate)
flow rate pressure
±0.55 %FS / 0.01 MPa ±1 digit or less (40 to 100 % of FS flow rate)
-0.07 to 0 MPa
Operating 0.5 %FS / 0.1 MPa ±1 digit or less (5 to 100 % of FS flow rate)
pressure
0 to 1 MPa
Operating 0.5 %FS / 0.01 MPa
±1 digit or less (5 to 100 % of FS flow rate)
pressure
-0.07 to 0 MPa
Operating -0.5 %FS / 0.1 MPa ±1 digit or less (5 to 100 % of FS flow rate)
pressure
0 to 1 MPa
Operating -0.5%FS/0.01MPa
±1digit or less (5 to 100% of FS flow rate)
pressure
-0.07 to 0 MPa
Pressure
characteristics of
instantaneous
flow rate for
Position 2
mounting (Note 2)
Pressure
characteristics of
instantaneous
flow rate for
Position 3
mounting (Note 3)