BRONKHORST
®
TABLE OF CONTENTS
1 Introduction ................................................................................................................................................... 9
1.1 General description................................................................................................................................ 9
1.1.1 Gas flow .......................................................................................................................................... 9
1.1.2 Liquid flow ....................................................................................................................................... 9
1.1.3 Pressure ......................................................................................................................................... 9
1.1.4 Housings ......................................................................................................................................... 9
1.1.5 Valves ........................................................................................................................................... 11
1.2 Sensor principles ................................................................................................................................. 12
1.2.1 Gas flow sensors (by-pass measurement)................................................................................... 12
1.2.2 Gas flow sensors (direct mass flow measurement, CTA based) ................................................. 12
1.2.3 Liquid flow sensors ....................................................................................................................... 12
1) The
-FLOW model for flowrates up to 2 g/h. ......................................................................................... 12
2) The CTA based LIQUI-FLOW model for flow rates up to approximately 1000 g/h. ................................ 13
1.2.4 Pressure sensor ........................................................................................................................... 13
1.3 Valve principles .................................................................................................................................... 13
1.3.1 Solenoid valve .............................................................................................................................. 13
1.3.2 Vary-P valve ................................................................................................................................. 13
1.3.3 Pilot operated valve ...................................................................................................................... 14
1.3.4 Bellows valve ................................................................................................................................ 14
1.4 K
v
-value calculation ............................................................................................................................. 14
1.4.1 For gases ...................................................................................................................................... 14
1.4.2 For liquids ..................................................................................................................................... 15
1.4.3 Maximum pressure drop ............................................................................................................... 16
1.5 Sensors and laminar flow devices ....................................................................................................... 16
1.6 Conversion factors ............................................................................................................................... 17
1.6.1 Gas conversion factors (by-pass measurement) ......................................................................... 17
1.6.2 Gas Conversion Factors (direct mass flow measurement, CTA-based)...................................... 18
1.6.3 Liquid Conversion Factors ............................................................................................................ 19
1.6.4 Software for conversion factor calculation ................................................................................... 19
2 Installation ................................................................................................................................................... 20
2.1 Receipt of equipment ........................................................................................................................... 20
2.2 Return shipment .................................................................................................................................. 20
2.3 Service ................................................................................................................................................. 20
2.4 Mounting .............................................................................................................................................. 21
2.5 In-line filter ........................................................................................................................................... 21
2.6 Fluid connections ................................................................................................................................. 21
2.7 Piping ................................................................................................................................................... 22
2.8 Electrical connections .......................................................................................................................... 22
2.9 Caution................................................................................................................................................. 22
2.10 Supply pressure ............................................................................................................................... 23
2.11 System purging ................................................................................................................................ 23
2.12 Seals ................................................................................................................................................ 23
2.13 Equipment storage ........................................................................................................................... 23
2.14 Electromagnetic compatibility .......................................................................................................... 23
2.14.1 Conditions for compliance with EMC requirements ..................................................................... 23
3 OPERATION ............................................................................................................................................... 25
3.1 General ................................................................................................................................................ 25
3.2 Power and warm-up............................................................................................................................. 25
3.3 Zeroing ................................................................................................................................................. 25
3.4 Start-up ................................................................................................................................................ 26
3.5 Operating conditions ............................................................................................................................ 26
3.6 Instrument performance ...................................................................................................................... 26
3.6.1 Sensors ........................................................................................................................................ 26
3.6.2 Controllers .................................................................................................................................... 26
3.7 Manual operation ................................................................................................................................. 26
3.8 Analog operation .................................................................................................................................. 27
3.9 BUS / digital operation ......................................................................................................................... 27
4 Maintenance ............................................................................................................................................... 28
4.1 General ................................................................................................................................................ 28
4.2 Gas flow sensor ................................................................................................................................... 28
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