Bruker Dektak XT User Manual

pg. 1, Revision 6/2017
Dektak XT 2D Profilometer Operation Manual
The Dektak XT is a 2D contact profilometer used for step height, pitch and surface roughness
measurements. Vision 64 application software controls the system data collection and analysis.
Specifications
• Stylus Contact Profilometry
• Two-dimensional surface profile measurements
• Stylus Force 1 to 15mg
• 12.5um diameter tip
• Sample X/Y Stage Manual 100mm (4 in.) X/Y, manual leveling
• Software Vision 64 Operation and Analysis Software
• Scan Length Range 55mm (2in.)
• Data Points Per Scan 120,000 maximum
• Max. Sample Thickness 50mm (1.95in.)
• Max. Wafer Size 200mm (8in.)
• Step Height Repeatability <5Å, 1sigma on 0.1μm step
• Vertical Range 1mm (0.039in.)
• Vertical Resolution 1Å max. (@ 6.55_m range

Bruker Dektak XT Specifications

General

Brand	Bruker
Model	Dektak XT
Category	Measuring Instruments
Language	English

Summary

Specifications

Loading a Sample

Unloading a Sample and Shutdown

Creating a Measurement Recipe

Scan Type Configuration

System configured with Stand Scan option.

Scan Range and Resolution

Defines height resolution; larger range means lower resolution. 6.5um yields ~0.1nm, 65.5um yields ~1nm.

Profile Selection for Topography

Choose profile matching sample topography for stylus placement in height analysis.

Stylus Type Selection

Select the currently installed stylus, e.g., 12.5 um.

Stylus Force Adjustment

Ranges from 1-15mg; use higher force for harder materials for accuracy.

Scan Length and Duration

Input scan length (50-55,000 um) and duration (10-20 sec for throughput).

Scan Resolution Calculation

Calculated from Scan Length and Scan Duration, not an open field.

Data Points Per Scan

Indicates the number of data points collected during measurement.

Scan Speed Calculation

Calculated scan speed in um/s from input scan Length and Duration.

Tower Up After Scan Setting

Automatically moves stylus to safe position after scan when checked.

Making the Measurement

Data Analysis