CKD FLUEREX WFK2 Series User Manual

Supports uorine liquids
Supports uorine liquids with excellent electrical insulation.
Ideal for controlling coolant in semiconductor manufacturing equipment.
Fluids with low global warming potential are also supported.
Compatible with ow rates of 0.4 to 250 L/min
Compatible with a wide range of ow rates.
Easy ow rate adjustment (Option)
Needle: Fine adjustment is possible with the manual valve.
Cock: Valve can be easily opened and closed.
All models equipped as standard with
uid temperature measuring function
Saves space and wiring time with no need for a
separately installed temperature sensor. As the
temperature sensor is inside the product, it is not
easily a󰀨ected by ambient temperatures.
Various output functions available
OUT1
OUT2
Analog Output
Switch Output
NPN/PNP can be switched
Pulse Output External Input
Analog Output
Switch Output
NPN/PNP can be switched
Pulse Output IO-Link
Instantaneous flow rate
Temperature
Instant flow rate1/2
Temp1/2
Accumulated flow
Instant flow 1/2 Temp 1/2
Accumulated flow
Accumulated flow Accumulated flow reset
Peak hold reset
Accumulated flow
Instantaneous flow rate
Temperature
Needle type Cock type
Fluorinert
™
FC-3283
HT135
Novec7300 SF10
FC-40
HT200
Galden
®
Novec
™
Opteon
™
* Compatible models: WFK2-005, WFK2-020, WFK2-050
* Fluorinerts ™ and Novec™ are trademarks of 3M Corporation.
* Galden
®
is a registered trademark of Solvay Special Polymers Japan.
* Opteon ™ is a trademark of Mitsui/Kemaz Fluoroproducts.
Temperature sensor

CKD FLUEREX WFK2 Series Specifications

General

Brand	CKD
Model	FLUEREX WFK2 Series
Category	Accessories
Language	English