Dektak XT User Manual

DektakXTStylusProfilometerUserInstructions(MMRC)
GLAs:EmilyWarren(ewarren@caltech.edu)andHeatherAudesirk(haudesir@caltech.edu)
DocumentUpdated:4/16/2012
ThesebasicinstructionsareforgeneraluseoftheDektakXTprofilometer.Thefulluser
guidecanbefoundonthedesktopofthecontrolcomputer.
Howthesystemworks:
TheDektakXTsystemtakesmeasurementselectromechanicallybymovinga
diamondtippedstylusoverthesamplesurfaceaccordingtoauserprogrammedscan
length,speed,andstylusforce.ThestylusislinkedtoaLinearVariableDifferential
Transformer(LDVT),whichproducesandprocesseselectricalsignalsthatcorrespondto
surfacevariationsofthesample.
Oursystemisonlyconfiguredin2Dmode,whichmeans:
ManualXYtranslation:101.6x101.6mm(4x4inches)ofXYtranslation,
manualleveling
manualthetarotation
Maximumsamplethickness:50mm(1.9inches)thick
Maximumscanlength:55mm(2.16inches)
StylusTipDiameter:2microns
Whenyouarrive,theinstrumentshouldbeoff,andthecovertotheisolationchambershouldbe
closed.
Thebottomofyoursamplemustbeclean(noHgorGa/Incontaminatedsamplesallowed!)
StartUp:
1.Turnonpowersupply(Blackboxonright)
2.Press(I)buttononwhitepowercontrolbox
3.StartVision64Software.Thefollowingshouldhappen:
Thetowerassemblywillmovetoitsupperlimit.Thesystemstopswiththestylus
intheTowerUpposition.
Thescanstageinitializes.
TheVision64Welcomescreenappears,followedbytheVision64“Instrument”
tab,whichincludestheDektakXTLiveVideoDisplay
4.Afterthesysteminitializes,itissafetoloadyoursampleontothestage(Brukerrecommends
lettingthesystemwarmupfor15minutes,butwehaven’tseenthatitmakesadifferencein
measurementquality).
*Putonglovesbeforetouchinganythinginsideofthelid*
5.Checkthattheflatglassblockisfreeofdust(thisflatsurfaceiswhatallowsustomeasure
1

Dektak XT Specifications

General

Vertical Range	Up to 1 mm
Vertical Resolution	0.1nm
Data Acquisition Rate	up to 1000 Hz
Power Requirements	100-240V AC, 50/60Hz
Max Sample Size	200mm x 200mm
Stylus Force	0.03 to 15 mg
Scan Length	55mm
Stylus Tip Radius	12.5 µm standard (other sizes available)

Summary

How the DektakXT System Works

System Configuration Details

Details system configuration in 2D mode, including translation limits, leveling, theta rotation, sample thickness, scan length, and stylus tip diameter.

DektakXT System Start-Up Procedure

Initial Power On and Software Launch

Steps for powering on the system, launching Vision64 software, and initial system initialization.

Sample Loading and Preparation

Instructions for loading a sample onto the stage, including positioning and centering it correctly.

Adjusting Sample Position for Scanning

Guide for manually positioning the sample using stage controls and lowering the stylus for measurement.

Calibration and Scan Parameters

Instrument Calibration

Guidance on using calibration standards to verify system functionality before measurements.

Scan Parameter Configuration

Details on setting scan type, range, profile, stylus tip, force, length, and duration for measurements.

Running and Analyzing Scans

Executing a Scan

Instructions on how to run single or multiple scans using the software interface.

Manual Leveling During Scan

Procedure for adjusting stage tilt to counteract data slope during a scan.

Data Analysis and Export

Steps for zeroing, leveling data, and exporting results using the Data Analyzer window.

Unloading and Powering Down

Sample Unloading Procedure

Steps to safely unload a sample after measurements are complete.

System Power Down

Instructions for properly shutting down the DektakXT system software and hardware.