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Dektak XT User Manual

Dektak XT
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DektakXTStylusProfilometerUserInstructions(MMRC)
GLAs:EmilyWarren(ewarren@caltech.edu)andHeatherAudesirk(haudesir@caltech.edu)
DocumentUpdated:4/16/2012
ThesebasicinstructionsareforgeneraluseoftheDektakXTprofilometer.Thefulluser
guidecanbefoundonthedesktopofthecontrolcomputer.
Howthesystemworks:
TheDektakXTsystemtakesmeasurementselectromechanicallybymovinga
diamondtippedstylusoverthesamplesurfaceaccordingtoauserprogrammedscan
length,speed,andstylusforce.ThestylusislinkedtoaLinearVariableDifferential
Transformer(LDVT),whichproducesandprocesseselectricalsignalsthatcorrespondto
surfacevariationsofthesample.
Oursystemisonlyconfiguredin2Dmode,whichmeans:
ManualXYtranslation:101.6x101.6mm(4x4inches)ofXYtranslation,
manualleveling
manualthetarotation
Maximumsamplethickness:50mm(1.9inches)thick
Maximumscanlength:55mm(2.16inches)
StylusTipDiameter:2microns
Whenyouarrive,theinstrumentshouldbeoff,andthecovertotheisolationchambershouldbe
closed.
Thebottomofyoursamplemustbeclean(noHgorGa/Incontaminatedsamplesallowed!)
StartUp:
1.Turnonpowersupply(Blackboxonright)
2.Press(I)buttononwhitepowercontrolbox
3.StartVision64Software.Thefollowingshouldhappen:
Thetowerassemblywillmovetoitsupperlimit.Thesystemstopswiththestylus
intheTowerUpposition.
Thescanstageinitializes.
TheVision64Welcomescreenappears,followedbytheVision64“Instrument”
tab,whichincludestheDektakXTLiveVideoDisplay
4.Afterthesysteminitializes,itissafetoloadyoursampleontothestage(Brukerrecommends
lettingthesystemwarmupfor15minutes,butwehaven’tseenthatitmakesadifferencein
measurementquality).
*Putonglovesbeforetouchinganythinginsideofthelid*
5.Checkthattheflatglassblockisfreeofdust(thisflatsurfaceiswhatallowsustomeasure
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Dektak XT Specifications

General IconGeneral
Vertical RangeUp to 1 mm
Vertical Resolution0.1nm
Data Acquisition Rateup to 1000 Hz
Power Requirements100-240V AC, 50/60Hz
Max Sample Size200mm x 200mm
Stylus Force0.03 to 15 mg
Scan Length55mm
Stylus Tip Radius12.5 µm standard (other sizes available)