Edwards EXT75DX - Introduction to Turbomolecular Pumps; Scope and Definitions; General Pump Description; Drive Electronics Overview

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Contents
B722-40-880 Issue F
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 General description ..................................................................................................... 1
1.3 Drive electronics ......................................................................................................... 2
1.4 Operational features .................................................................................................... 3
1.4.1 Power limit setting ...................................................................................................... 3
1.4.2 Standby speed ............................................................................................................ 3
1.4.3 Timer ...................................................................................................................... 3
1.4.4 Analogue output ......................................................................................................... 4
1.4.5 Automatic vent options ................................................................................................. 4
1.4.6 Normal speed setting .................................................................................................... 4
1.4.7 Electronic braking ....................................................................................................... 5
1.5 Logic interface ........................................................................................................... 5
1.5.1 Parallel control and monitoring ....................................................................................... 5
1.5.2 Full serial control ........................................................................................................ 6
1.5.3 Serial control with parallel monitoring ............................................................................... 6
1.5.4 Parallel control with occasional serial monitoring or serial setup ............................................... 6
1.5.5 Podule configuration (serial setup) ................................................................................... 6
2 Technical data ....................................................................................7
2.1 General .................................................................................................................... 7
2.2 Pumping media ........................................................................................................... 7
2.3 Vent gas specification and vent control data ......................................................................13
2.4 Purge gas specification ................................................................................................14
2.5 Cooling water ............................................................................................................14
2.6 Materials exposed to gases pumped .................................................................................14
2.7 Electrical data ...........................................................................................................15
2.8 Logic interface connector .............................................................................................15
2.9 Podule connector socket ..............................................................................................16
2.10 Indicator LEDs ...........................................................................................................18
2.11 Operating and storage environment .................................................................................18
3 Installation ....................................................................................... 19
3.1 Unpack and inspect .....................................................................................................19
3.2 Typical installation .....................................................................................................19
3.3 Connection to the vacuum system ...................................................................................19
3.3.1 Inlet screen (supplied fitted) .........................................................................................21
3.3.2 Mechanical fixing .......................................................................................................22
3.3.3 Inlet connection and orientation .....................................................................................22
3.3.4 Base mounting ...........................................................................................................22
3.3.5 Backing connection .....................................................................................................23
3.3.6 Interstage connection (iDX variants only) ...........................................................................23
3.4 Purge gas connection ...................................................................................................23
3.4.1 Connect the purge gas .................................................................................................23
3.4.2 Recommended purge gas flow ........................................................................................24
3.5 Electrical installation ..................................................................................................24
3.5.1 Introduction .............................................................................................................24
3.5.2 Earth (ground) connections ...........................................................................................24
3.5.3 Connect the logic interface to the TIC ..............................................................................24
3.5.4 Connect the logic interface to the customer control equipment ...............................................24
3.5.5 Connect the electrical supply .........................................................................................25
3.6 Parallel interface mode ................................................................................................26
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