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General| Brand | Edwards |
|---|---|
| Model | EXT75DX |
| Category | Water Pump |
| Language | English |
Defines the manual's scope, purpose, and key terminology for turbomolecular pumps.
Provides an overview of the DX Compound Turbomolecular Pumps and their basic operational principles.
Explains the function and safety features of the pump's integrated drive electronics (Podule).
Details pump specifications, pumping media compatibility, and fluid handling requirements.
Covers electrical requirements, logic interface, indicators, and operating/storage environment conditions.
Procedures for unpacking, checking components, and initial inspection of the pump.
Guides for connecting the pump to the vacuum system and mechanical fixing procedures.
Explains parallel and serial interface modes for pump control and monitoring.
Instructions on venting options, cooling methods, and bakeout processes for the pump.
Using serial commands to configure pump settings like power limit, speed, timer, and addresses.
How to configure and operate the pump using Edwards TIC controllers or PC software.
Steps for pump start-up, parallel/serial operation, and monitoring system parameters.
Handling extreme conditions like high pressure, temperature, over-speed, and electrical supply failure.
Guidance on bearing maintenance, rotor life, and external surface cleaning procedures.
Diagnosing faults using status LEDs, error codes, and system status words for problem resolution.
Procedures for storing the pump correctly to maintain its condition and performance.
Instructions for safe and environmentally compliant disposal of the pump and accessories.
Information on Edwards service centers, spare parts, and returning pumps for service.
Details on optional accessories like coolers, bakeout bands, and venting components.
Information on interface plugs, TIC controllers, and PC software for pump integration and control.
