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Edwards EXT Series - User Manual
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B753-03-880
Issue F Original
Instruction Manual
EXT Compound Molecular Pumps:
EXT255H, EXT255Hi and EXT255HVi
Description
Item Number
EXT255Hi/ISO10
0
B753-03-00
0
EXT255H/100CF
B753-02-00
0
EXT255H/ISO100
B753-01-00
0
EXT255HV
i/ISO10
0
B753-07-00
0
2
Table of Contents
Main Page
Default Chapter
3
Table of Contents
3
Introduction
7
Scope and Definitions
7
General Description
8
Vent Options and Vent Control
9
Cross-Section View of EXT255H Pump
10
Cross-Section View of Ext255Hvi Pump
11
Technical Data
13
General
13
Pumping Media
13
Pumps Without Gas Purge
13
Pumps with Gas Purge
14
Vent Gas Specification and Vent Control Data
14
Purge Gas Specification
14
Cooling-Water
15
Maximum Allowed Rise in Backing Pressure against Time for Controlled Venting: System Pressure (Mbar/Pa) against Time (S)
15
Technical Data
15
Materials Exposed to Gases Pumped
17
Ext255H/Ext255Hi Dimensions (MM)
18
Ext255Hvi Dimensions (MM)
19
Installation
21
Unpack and Inspect
21
Typical Installation
21
Checklist of Items
21
Typical Pumping System with an EXT255H Pump
22
Typical Pumping System with an Ext255Hi/Ext255Hvi Pump
23
Connect to the Vacuum System
24
Inlet Screen
24
Mechanical Fixing
24
Correct Installation of the Inlet-Screen
24
Base Mounting
25
Inlet Connection and Orientation
25
Backing Connection
26
Interstage Connection (Ext255Hi/Ext255Hvi Only)
26
Vent-Valve Connection and Control
26
Vent-Restrictor Orifice Diameter (with Atmospheric Pressure at the Inlet of the Vent-Valve)
26
Purge Gas Connection
27
Connect the Purge Gas
27
Recommended Purge Gas Flow
27
Electrical Installation
27
Cooling
27
Introduction
27
Forced-Air Cooling
28
Water-Cooling
28
Operation
29
Start-Up
29
Stand-By
29
Shut-Down
30
Safety Interlocks and Control System
30
Bakeout
30
Maintenance
33
Introduction
33
Bearing Life
33
Rotor Life
33
Clean the Pump
33
Fault Finding
34
Storage and Disposal
37
Storage
37
Disposal
37
Service, Spares and Accessories
39
Introduction
39
Service
39
Spares
39
ISX Inlet-Screen
39
Inlet-Strainer (Ext255Hi Pump Only)
39
Interstage-Port Seal (Ext255Hvi Pump Only)
40
WCX Water-Cooler
40
Inlet-Flange Seals
40
Accessories
40
Installation
40
EXC Controller
40
Pump-To-Controller Cable
40
EXDC Drive Modules
41
BX Bakeout Band
41
FL20K Foreline Trap
41
Installation of Optional Accessories (and Spares): Ext255Hi Shown
42
TAV Vent-Valve and Vent-Port Adaptor
43
ACX Air-Cooler
43
Vibration Isolators
43
PRX Purge-Restrictor
43
VRX Vent-Restrictor
43
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Edwards EXT Series Specifications
General
Brand
Edwards
Model
EXT Series
Category
Water Pump
Language
English
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