Edwards EXT Series - Typical Pumping System with an EXT255 H Pump

B753-03-880 Issue F
Page 16 © Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
Figure 6 - Typical pumping system with an EXT255H pump
1. Vacuum system
2. High-vacuum gauge
3. Vibration isolator
4. Inlet-screen
5. EXT pump
6. Backing valve
7. Vacuum
8. Flexible bellows
9. Foreline trap
10.Rotary backing-pump
11.Mist filter
12.Cooling-water connectors
13.EXC controller
14.Air-cooler
15.Vent port adaptor
16.PRX10 purge restrictor
17.Regulated purge gas supply
18.Vent-valve
19.Alternative position for vent-valve