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General| Brand | Edwards |
|---|---|
| Model | EXT70H Series |
| Category | Water Pump |
| Language | English |
Defines the manual's scope and key terminology for EXT pumps.
Provides an overview of EXT compound molecular pumps and their design.
Explains methods for venting the pump and vacuum system safely.
Lists general specifications like temperature, altitude, and electrical supply for EXT pumps.
Details gases suitable for pumping and important safety precautions.
Specifies requirements for vent gases and control parameters for safe operation.
Outlines specifications for purge gas used in specific EXT pump models.
Details the required quality and specifications for cooling water.
Lists materials used in pump construction that contact pumped gases.
Instructions for safely unpacking and checking the pump for damage and completeness.
Illustrates typical pumping system configurations for EXT pumps.
Guidance on connecting the pump to the vacuum system, including flange types and fixing.
Describes how to connect and operate vent valves for safe system venting.
Explains how to connect and manage purge gas for specific EXT pump models.
Details electrical connections, including earth bonding and drive module setup.
Provides instructions and recommendations for pump cooling methods (air/water).
Step-by-step guide for starting the EXT pump and associated systems.
Procedures for safely shutting down the EXT pump and vacuum system.
Actions to take if the pump operates outside safe speed limits to prevent damage.
Guidance on performing bakeout procedures to achieve low ultimate vacuum.
Overview of maintenance operations for EXT turbomolecular pumps.
Information on bearing service life and replacement recommendations.
Details on rotor service life and recommendations for exchange or major service.
Procedures and safety warnings for cleaning the external surfaces of the pump.
Troubleshooting guide for common pump issues and recommended actions.
Instructions for proper storage of the EXT pump to maintain its condition.
Guidelines and safety warnings for the safe disposal of EXT pumps.
Information on product availability and ordering spares/accessories.
Details on Edwards Service Centres and available support options.
Information on replacement inlet-screens for EXT pumps, including part numbers.
Details on compatible EXDC drive modules for EXT pumps and their part numbers.
