Edwards EXT70H Series User Manual

© Edwards Limited 2008. All rights reserved. Page 17
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
B722-20-880 Issue D
Figure 5 - Typical pumping system with an EXT70Hi or EXT255Hi pump
1. Vacuum chamber 1
2. High-vacuum gauge
3. Vibration isolator
4. Inlet-screen
5. EXT pump
6. Not used
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10. Rotary backing-pump
11. Mist filter
12. Cooling-water connectors
13. EXDC drive module
14. Air-cooler
15. PRX10 purge restrictor
*
16. Regulated purge gas supply
*
17. Vent-valve
18. Alternative position for vent-valve
19. Vacuum chamber 2
20. Inlet-strainer
21. Interstage-port
*
EXT255Hi only

Edwards EXT70H Series Specifications

General

Brand	Edwards
Model	EXT70H Series
Category	Water Pump
Language	English