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Edwards EXT Series - TAV Vent-Valve and Vent-Port Adaptor; ACX Air-Cooler; Vibration Isolators; PRX Purge-Restrictor

Edwards EXT Series
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© Edwards Limited 2008. All rights reserved. Page 37
Edwards and the Edwards logo are trademarks of Edwards Limited.
Service, spares and accessories
B753-03-880 Issue F
7.4.7 TAV vent-valve and vent-port adaptor
Two solenoid-operated vent-valves are available for system venting. The valves are 24 V d.c., normally-open, and
can be driven automatically from the EXC Controller. The solenoid-valve is fitted in place of the manual-valve, or
alternatively can be fitted with an adaptor (supplied with the valve) and be used with any suitable NW10 flanged port
on your vacuum system.
The vent-port adaptor allows the vent-port or the purge-port to be used with any suitable NW10 fitting: see Figure 9,
item 8 and item 11.
7.4.8 ACX air-cooler
An ACX air-cooler can be fitted to the EXT pump. However, please refer to Section 3 to check the suitability of air-
cooling in a particular application.
7.4.9 Vibration isolators
In applications where the small amount of vibration generated by the turbomolecular pump is a problem, a vibration
isolator can be fitted. The isolator consists of two special flanges separated by a flexible bellows and a rubber, anti-
vibration, outer collar. The isolator required depends on the pump inlet-flange size.
7.4.10 PRX purge-restrictor
A modified DN10NW centring-ring is available to filter the purge gas and restrict its flow rate to the recommended
flow of 25 sccm. The restrictor is suitable for all EXT pumps fitted with a purge-port.
7.4.11 VRX vent-restrictor
Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT pump. Refer to Section 3.4 for
information on the selection of the correct VRX vent-restrictor.
Product Item Number
TAV5 vent-valve B580-66-010
TAV6 vent-valve B580-66-020
NW10-1/8 inch BSP male adaptor B580-66-011
Pump Air-cooler Item Number
EXT255H/Hi ACX250H B580-53-160
Inlet-flange size Item Number
DN100ISO-K B580-20-000
Purge-restrictor Flange size Item Number
PRX10 NW10 B580-65-001
Vent-restrictor Orifice diameter (mm) Item Number
VRX10 0.1 B580-66-021
VRX20 0.2 B580-66-022
VRX30 0.3 B580-66-023
VRX50 0.5 B580-66-024
VRX70 0.7 B580-66-025

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