Edwards EXT Series - Typical Pumping System with an Ext255 Hi;Ext255 Hvi Pump

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Installation
B753-03-880 Issue F
Figure 7 - Typical pumping system with an EXT255Hi/EXT255HVi pump
1. Vacuum chamber 1
2. High-vacuum gauge
3. Vibration isolator
4. Inlet-screen
5. EXT pump
6. Not used
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10.Rotary backing-pump
11.Mist filter
12.Cooling-water connectors
13.EXC controller
14.Air-cooler
15.Vent port adaptor
16.PRX10 purge restrictor
17.Regulated purge gas supply
18.Vent-valve
19.Alternative position for vent-valve
20.Vacuum chamber 2
21.Inlet-strainer
22.Interstage-port
23.Backing valve