Keithley 6517A Getting Started Guide

COULOMBS ACCURACY TEMPERATURE
(1 Year)
1,2
COEFFICIENT
5½
DIGIT 18°–28°C0°–18°C & 28°–50°C
RANGE RESOLUTION ±(%rdg+counts) ±(%rdg+counts)/°C
2 nC 10 fC 0.4 + 5 0.04 + 3
20 nC 100 fC 0.4 + 5 0.04 + 1
200 nC 1 pC 0.4 + 5 0.04 + 1
2 µC 10 pC 0.4 + 5 0.04 + 1
Note:
1
Charge acquisition time must be <1000s, derate 1% for each
additional 10,000s.
2
When properly zeroed, 5½ digit, 1 PLC (power line cycle), median
filter on, digital filter = 10 readings.
INPUT BIAS CURRENT: <4fA at T
CAL
. Temperature coefficient = 0.5fA/°C.
OHMS: Normal Method
TEMPERATURE
COEFFICIENT
ACCURACY
1
(10–100% Range)
5½ DIGIT (10–100% Range) 0
°–18°C &
RESO- 18
°–28°C (1 Yr.) 28°–50°C TEST AMPS
RANGE LUTION ±(% rdg+counts) ±(% rdg+counts) VOLTS RANGE
2MΩ 10 Ω 0.125 + 1 0.01 + 1 40 V 200 µA
20MΩ 100 Ω 0.125 + 1 0.01 + 1 40 V 20 µA
200MΩ 1kΩ 0.15 + 1 0.015 + 1 40 V 2 µA
2GΩ 10 kΩ 0.225 + 1 0.035 + 1 40 V 200 nA
20 GΩ 100 kΩ 0.225 + 1 0.035 + 1 40 V 20 nA
200 GΩ 1MΩ 0.35 + 1 0.110 + 1 40 V 2 nA
2TΩ 10MΩ 0.35 + 1 0.110 + 1 400 V 2 nA
20 TΩ 100MΩ 1.025 + 1 0.105 + 1 400 V 200 pA
200 TΩ 1GΩ 1.15 + 1 0.125 + 1 400 V 20 pA
Note:
1
Specifications are for auto V-source ohms, when properly zeroed, 5½ digit, 1 PLC, median filter on, digital filter = 10
readings. If user selectable voltage is required, use manual mode. Manual mode displays resistance (up to 10
18
Ω) calculated
from measured current. Accuracy is equal to accuracy of V-source plus accuracy of selected Amps range.
PREAMP SETTLING TIME: Add voltage source settling time to preamp settling time in Amps specification.
OHMS: Alternating Polarity Method
Using Keithley 8002A or 8009 fixture
REPEATABILITY: ∆I
BG *
R/V
ALT
+ 0.1% (1σ) (instrument temp. constant ±1°C).
ACCURACY: (V
SRC
Err + I
MEAS
Err
*
R)/V
ALT
where:∆I
BG
is a measured, typical background current noise from the sample and fixture over the measurement time
programmed, under normal measurement conditions
(1 PLC, same range, filters off, etc.)
V
ALT
is the alternating polarity voltage used
V
SRC
Err is the accuracy (in volts) of the voltage source using V
ALT
as the setting
I
MEAS
Err is the accuracy (in amps) of the ammeter using V
ALT
/R as the rdg
With conditions: ∆I
BG *
R/V
ALT
< 10%; capacitance of sample <10nF in parallel with measured R
Note that the measured resistance is affected by the series and parallel resistance of the test fixture.
Specifications 4-3
COULOMBS

Keithley 6517A Specifications

General

Brand	Keithley
Model	6517A
Category	Measuring Instruments
Language	English