Preface
Dear users, first of all, thanks for your trust and using 308nm Excimer
System manufactured by our company.
Please read this manual and attached documentations carefully
before your first installation and using this system.
To improve capability and reliability of equipment, we will
continuously upgrade our product (including hardware and software). We
will announce you immediately if any amendments are made. Thanks in
advance if you correct it after finding any mistake or oversight.
This manual contains content protected by copyright law, all rights
reserved, without prior written approval, shall not be any part of this
manual copy, photographic copy, photocopy, or translated into other
language
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