1 Description
1.1 General
The COMBIVAC CM 31 is supplied ready for
use. However, we strongly recommend rea-
ding these Operating Instructions so that
optimum operating conditions can be set up
right from the start.
These Operating Instructions contain important informa-
tion on the functions, installation, start-up, operation and
troubleshooting of the CM 31.
Important remarks concerning operational safety and
protection are emphazised as follows.
Warning Indicates procedures that must be strict-
ly observed to prevent hazards to peo-
ple.
Caution Indicates procedures that must strictly
be observed to prevent damage to, or
destruction of, the CM 31 and to attain
specified performance levels.
Note
Indicates special technical requirements that the user
must comply with.
The references to diagrams, e.g. (2/5), consist of the Fig.
No. and the Item No. in that order.
Unpack the CM 31 immediately after delivery, even if it is
to be installed at a later date.
Examine the shipping container for any external dama-
ge. Completely remove the packaging materials.
Note
Retain the packaging materials in the event of com-
plaints about damage.
Check that the CM 31 is complete (see Section 1.4).
Carefully examine the CM 31 visually.
If any damage is discovered, report it immediately to the
forwarding agent and insurer. If the damaged part has to
be replaced, please contact Leybold.
1.1.1 Purpose
The COMBIVAC CM 31 is a universal vacuum gauge
which combines two principles of measurement - Pirani
(Thermovac) and cold cathode (Penningvac) - for the
measurement and control of vacuum pressures within
the entire range between 1·10
-9
mbar/Torr and atmos-
pheric pressure.
One PENNINGVAC sensor (PR 32, PR 25, PR 35 or PR
36) and max. two THERMOVAC sensors (TR 201, TR
205, TR 206 or also TR 211 and TR 216) may be con-
nected.
The built-in RS 232 C interface permits computer con-
trolled operation as well as the exchange of measure-
ment data between the COMBIVAC CM 31 and a com-
puter.
Please refer to the technical data of this instrument to
determine whether or not this instrument suits your appli-
cation.
1.2 Technical data
1.2.1 General data
Measurement range 1·10
-9
mbar to 1·10
+3
mbar
1·10
-9
Torr to 760 Torr
THERMOVAC channels 2
PENNINGVAC channel 1
Measurement units mbar, Torr, Pa, Micron
(selectable)
Types of gas Air / N
2
, Ar (selectable)
Display
digital 7 segment LCD
analogue LCD bar graph
Resolution see tables 3 and 4 or tables 7 and 8 in
Section 2.10.1 or 2.10.2.
1.2.2 TM measurement channels
Measurement range 1·10
-3
mbar to 1000 mbar
1·10
-3
Torr to 760 Torr
Measurement uncertainty in the range
10
-3
to 10
-2
mbar / Torr: 20 % of the meas. value
10
-2
to 10
+2
mbar / Torr: 15 % of the meas. value
Sensors TR 201; DN 10 KF
TR 205; DN 16 CF and TR 206; DN 10 KF
TR 211; DN 16 KF and TR 216; DN 16 KF
Length of gauge head cable up to 100 m
Cable length alignment
automatically for TR 211 and TR 216
For TR 201, TR 205 and TR 206
Enter cable length in the
parameter mode (see Parameter-Page 9)
4
To Next Page
Loading...