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LEYBOLD TURBOVAC 361 User Manual

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TURBOVAC
Turbomolecular pumps with external frequency converter
TURBOVAC 151, 151 C
TURBOVAC 361, 361 C
TURBOVAC 600 C
TURBOVAC 1000 C
TURBOVAC 1100 C
and pumps modified by Leybold
Incorporation Declaration & Operating Instructions
GA05118_002_C1
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LEYBOLD TURBOVAC 361 Specifications

General IconGeneral
BrandLEYBOLD
ModelTURBOVAC 361
CategoryWater Pump
LanguageEnglish

Summary

Safety Information

Mechanical Hazards

Potential dangers from moving parts, pressure limits, and mounting.

Electrical Hazards

Risks associated with electrical connections and voltage.

Material and Substance Hazards

Dangers from pumping reactive, dusty media, or gas leaks.

Ignition and Pump Damage Risks

Preventing ignition of explosive mixtures and damage from foreign objects.

Product Description

Design and Standard Equipment

Overview of TURBOVAC models, features, and included equipment.

Ordering Data and Accessories

Part numbers for pumps, converters, cables, and other accessories.

Installation Procedures

General Installation Guidelines

Proper utilization, operating environment, and fitting accessories.

Mounting the Pump

Procedures for attaching the pump to the vacuum chamber.

System Connections

Connecting forevacuum, cooling, purge gas, and frequency converter.

Operation Procedures

Media Compatibility and Start-up

Suitable media, purge gas, and initial pump start-up.

Switching On and Shutting Down

Step-by-step guide for starting and shutting down the pump.

Venting and Bakeout

Methods for venting the pump and performing bakeout procedures.

Maintenance

Routine Maintenance and Cleaning

Recommendations for rotor exchange, filter, and cleaning the pump.

Leybold Service and Contamination

Procedures for sending equipment for service and contamination declarations.

Troubleshooting

Troubleshooting Guide

Identifying and resolving common pump malfunctions and errors.

Waste Disposal

Handling Contaminated Equipment

Procedures for decontaminating and disposing of the pump.

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