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LEYBOLD TURBOVAC 1100 C User Manual

LEYBOLD TURBOVAC 1100 C
44 pages
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TURBOVAC
Turbomolecular pumps with external frequency converter
TURBOVAC 151, 151 C
TURBOVAC 361, 361 C
TURBOVAC 600 C
TURBOVAC 1000 C
TURBOVAC 1100 C
and pumps modified by Leybold
Incorporation Declaration & Operating Instructions
GA05118_002_C1

Table of Contents

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LEYBOLD TURBOVAC 1100 C Specifications

General IconGeneral
Inlet flangeDN 250 ISO-K
Ultimate pressure5e-11 mbar
Bearing typeMagnetic bearing
Cooling methodWater cooling
Outlet flangeISO-KF 40

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