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LEYBOLD
Water Pump
TURBOVAC i(X)
LEYBOLD TURBOVAC i(X) User Manual
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Part Nos.
84007xVxxxx
84008xVxxxx
84009xVxxxx
84010xVxxxx
850092Vxxxx(U)
850102Vxxxx(U)
850122Vxxxx(U)
850132Vxxxx(U)
x = 0 to 9
TURBOV
AC i(X)
TURBOV
AC 850 i(X), 950 i(X), 1350 i, 1450 i
T
urbomolecular Pumps with Integrated
Fr
equency Converter
Operating Instructions 300855170_002_C8
2
Table of Contents
Table of Contents
2
Important Safety Information
5
Safety Symbols
5
Mechanical Hazards
6
Electrical Hazards
7
Thermal Hazards
7
Danger through Materials and Substances
7
Dangers in Connection with Safety-Related Measures and Precautions
7
Description
8
Design
10
Standard Equipment
10
Technical Data
11
Technical Data for the Integrated Drive Electronics
12
Pumping Speed Curves
13
Operation Diagrams
15
Ordering Data
19
Transport and Storing
23
Installation
24
Conforming Utilization
24
Non-Conforming Utilization
24
Operating Environment
25
Fitting Accessories
26
Attach the Pump to the Vacuum Chamber
27
Forevacuum Connection
35
Connect the Cooling
36
Air Cooling
36
Water Cooling
37
Water Quality
38
Connect a Power Failure Venting Valve or a Venting Valve
40
Connect Purge Gas
41
Connect a Flange Heater
42
Connect a Vacuum Gauge Head (Only for TURBOVAC IX)
43
Electrical Connection
44
Operation
49
Media Compatibility / Purge Gas
49
Interfaces
49
Switching on
51
Shutting down
52
Venting
53
Bakeout
54
Operation after a Longer Storage Period
54
Removing the Pump from the System
55
Maintenance
56
Cleaning
56
Leybold Service
56
Bearing Monitoring and Conditioning
57
Troubleshooting
59
Waste Disposal
61
Certificates
62
EU Declaration of Conformity
63
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LEYBOLD TURBOVAC i(X) Specifications
General
Brand
LEYBOLD
Model
TURBOVAC i(X)
Category
Water Pump
Language
English
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