LEYBOLD TURBOVAC i(X) - User Manual

Part Nos.
84007xVxxxx
84008xVxxxx
84009xVxxxx
84010xVxxxx
850092Vxxxx(U)
850102Vxxxx(U)
850122Vxxxx(U)
850132Vxxxx(U)
x = 0 to 9
TURBOVAC i(X)
TURBOVAC 850 i(X), 950 i(X), 1350 i, 1450 i
Turbomolecular Pumps with Integrated
Frequency Converter
Operating Instructions 300855170_002_C8

LEYBOLD TURBOVAC i(X) Specifications

General

Brand	LEYBOLD
Model	TURBOVAC i(X)
Category	Water Pump
Language	English

Summary

Safety Information Overview

Obligation to Provide Information

User must read and follow instructions for safe and efficient operation from the start.

Trained Personnel Definition

Defines skilled workers with knowledge in mechanics, electrical engineering, and vacuum technology.

Warning and Caution Symbols

Explains the meaning of WARNING, CAUTION, and NOTICE symbols and their hazard implications.

Important Safety Information

Safety Symbols

Describes safety symbols used on the product and in documentation for necessary care and attention.

Mechanical Hazards

Ejection of Parts Warning

Warns about potential ejection of parts due to insufficient mounting or rotor destruction.

Cutting and Crushing Caution

Warns about risks of cutting and crushing fingers when reaching into open flanges.

Pressure Ejection Caution

Warns about ejection of parts due to excessive pressure, especially with purge gas.

Vacuum Hazard Caution

Warns about injury risk from being pulled into vacuum with open flanges.

Falling Parts Caution

Warns about the risk of falling parts during transport.

Electrical, Thermal, and Material Hazards

Electrical Shock Caution

Warns about electrical shock from contact with live parts and improper connections.

Burns Caution

Warns about burns from touching hot surfaces; advises handling when cool.

Hazardous Substances Warning

Warns about hazardous gases, vapours, and deposits from exhaust and leaks.

Automatic Start-Up Caution

Warns about unwanted pump start-up due to lack of emergency shut-down switch.

Product Description and Models

TURBOVAC Models Overview

Illustrates various TURBOVAC models including TURBOVAC 850 i, 950 i, and 850 iX.

Additional Product Models

Additional TURBOVAC Models

Illustrates TURBOVAC 1350 i and 1450 i models, including versions with optional interfaces.

Design and Standard Equipment

1.1 Design

Describes the TURBOVAC as a wide-range TMP with Holweck stage and integrated frequency converter.

1.2 Standard Equipment

Lists standard equipment including the drive unit, eye-bolts, and protective caps on flanges.

Technical Specifications

TURBOVAC Technical Specifications

Provides detailed technical specifications for TURBOVAC pumps (850, 950, 1350, 1450).

Integrated Drive Electronics Data

1.3.1 Technical Data for Integrated Drive Electronics

Details technical data for the drive electronics and vacuum system control unit for TURBOVAC i and iX.

Pumping Speed Curves

TURBOVAC 850 i Pumping Speed

Displays pumping speed curves for TURBOVAC 850 i for Nitrogen, Helium, Argon, and Hydrogen.

TURBOVAC 950 i Pumping Speed

Displays pumping speed curves for TURBOVAC 950 i for Nitrogen, Helium, Argon, and Hydrogen.

More Pumping Speed Curves

TURBOVAC 1350 i Pumping Speed

Displays pumping speed curves for TURBOVAC 1350 i for Helium, Nitrogen, Argon, and Hydrogen.

TURBOVAC 1450 i Pumping Speed

Displays pumping speed curves for TURBOVAC 1450 i for Nitrogen, Argon, Hydrogen, and Helium.

Operation Diagrams

Operation Diagram for Nitrogen (TURBOVAC 850 i)

Illustrates operational limits for nitrogen, showing gas throughput vs. pressure for various cooling methods.

More Operation Diagrams

Operation Diagram for Argon (TURBOVAC 850 i)

Illustrates operational limits for argon, showing gas throughput vs. pressure for various cooling methods.

950 i Operation Diagrams

Operation Diagrams for Nitrogen (TURBOVAC 950 i)

Illustrates operational limits for nitrogen for TURBOVAC 950i, showing gas throughput vs. pressure.

Operation Diagrams for Argon (TURBOVAC 950 i)

Illustrates operational limits for argon for TURBOVAC 950i, showing gas throughput vs. pressure.

1350;1450 i Operation Diagrams

Operation Diagrams for Nitrogen (TURBOVAC 1350;1450 i)

Illustrates operational limits for nitrogen for TURBOVAC 1350/1450i, showing gas throughput vs. pressure.

Operation Diagrams for Argon (TURBOVAC 1350;1450 i)

Illustrates operational limits for argon for TURBOVAC 1350/1450i, showing gas throughput vs. pressure.

Ordering Data

1.4 Ordering Data

Lists part numbers for TURBOVAC pumps based on interface and flange type.

Dimensional Drawings

TURBOVAC 850 i and 950 i Dimensions

Provides dimensional drawings and specifications for TURBOVAC 850 i and 950 i models.

More Dimensional Drawings

TURBOVAC 850 iX and 950 iX Dimensions

Provides dimensional drawings and specifications for TURBOVAC 850 iX and 950 iX models.

1350;1450 i Dimensional Drawings

TURBOVAC 1350 i and 1450 i Dimensions

Provides dimensional drawings and specifications for TURBOVAC 1350 i and 1450 i models.

Transport and Storing

Transport and Unpacking

Instructions for safe transport, handling, and unpacking of the turbomolecular pump.

Storing the Pump

Guidelines for storing the pump, including conditions and recommended procedures for long-term storage.

Installation Guide

3.1 Conforming Utilization

Defines the intended use of the turbomolecular pump for generating vacuum in non-corrosive processes.

Utilization and Operating Environment

3.1.1 Non-conforming Utilization

Lists various uses that are considered non-conforming and potentially hazardous.

3.2 Operating Environment

Specifies permissible ambient temperature, installation altitude, and environmental conditions for operation.

Fitting Accessories

3.3 Fitting Accessories

Details how to connect accessory components for TURBOVAC i and iX, including a table of pre-configured accessories.

Attaching the Pump

3.4 Attach the Pump to the Vacuum Chamber

Instructions for mounting the pump, including permitted positions and crucial precautions.

Mounting Positions

Illustrates and describes permitted mounting positions for TURBOVAC 1350 i and 1450 i.

Mounting Precautions

Provides crucial notices regarding pump damage, rotor contact, and secure mounting.

Pump Connections and Torque

Connections Overview

Illustrates the various connections on the TURBOVAC pump, including power, interfaces, vent, and purge gas.

Rotor Seizure Torque

Details the torques that need to be absorbed by the system in case of rotor seizure.

ISO-K Flange Mounting

Flange Mounting for ISO-K Flanges

Provides instructions and requirements for mounting ISO-K flanges, including O-ring and centering ring placement.

ISO-K Flange Mounting Details

ISO-K Flange at ISO-K Flange

Details clamping, fastening torque, and bolt specifications for ISO-K to ISO-K flange connections.

ISO-K Flange at ISO-F Flange

Details bolt specifications, torque, and requirements for ISO-K to ISO-F flange connections.

ISO-K Flange Mounting with Claws

ISO-K Flange Mounting with Claws

Details specifications for mounting ISO-K flanges with claws, including bolts and torque.

CF and ISO-F Flange Mounting

Flange Mounting for CF Flanges

Instructions for mounting CF flanges, including checking sealing edge and copper gasket.

Flange Mounting for ISO-F Flanges

Instructions for mounting ISO-F flanges, emphasizing clean and dry contact surfaces.

CF Flange Connections

CF Flange Connection with Clearance Hole

Details bolt specifications, torque, and requirements for CF flanges with clearance holes.

CF Flange Connection with Blind Hole Thread

Details bolt specifications, torque, and requirements for CF flanges with blind hole threads.

ISO-F Flange Connections

ISO-F Flange Connection with Clearance Hole

Details bolt specifications, torque, and requirements for ISO-F flanges with clearance holes.

ISO-F Flange Connection with Blind Hole Thread

Details bolt specifications, torque, and requirements for ISO-F flanges with blind hole threads.

Forevacuum Connection

3.5 Forevacuum Connection

Instructions for connecting the forevacuum line, including isolation from vibrations and pressure limits.

Connecting the Cooling System

3.6 Connect the Cooling

Explains cooling requirements based on pumping power, ambient temperature, and gas throughput.

3.6.1 Air Cooling

Instructions for installing and connecting air-cooled units, ensuring sufficient fresh air availability.

Water Cooling

3.6.2 Water Cooling

Instructions for attaching water cooling blocks and connecting hoses for TURBOVAC models.

Cooling Water Quality

3.6.3 Water Quality

Specifies required water quality parameters and limit values for trouble-free cooling operation.

Cooling Water Requirements and Dewpoint

Cooling Water Requirements

Provides a graph showing cooling water flow requirements based on temperature.

Dewpoint Diagram

Illustrates minimum coolant inlet temperature to avoid condensation based on ambient temperature and humidity.

Venting and Purge Gas Connections

3.7 Connect a Power Failure Venting Valve or Venting Valve

Instructions for connecting and configuring venting valves for TURBOVAC i and iX.

Purge Gas Connection

3.8 Connect Purge Gas

Provides guidance on using purge gas and connecting purge gas valves or throttles.

Flange Heater Connection

3.9 Connect a Flange Heater

Instructions for connecting flange heaters for CF flanges, including options for driving via relay box or power supply.

Vacuum Gauge Head Connection

3.10 Connect a Vacuum Gauge Head (TURBOVAC IX)

Lists compatible vacuum gauge heads and connection details for TURBOVAC IX.

Electrical Connection

3.11 Electrical Connection

Details electrical connection requirements, including power supply and emergency shut-down switch.

Interface Connections

Interface Connections

Illustrates the various interfaces (REMOTE, USB, RS 485, Anybus) on TURBOVAC i and iX models.

LED Status and Grounding

LED Status Indicators

Explains the meaning of different LED states (green, yellow, red) for pump status and errors.

Earth (Ground) Connection

Recommends fitting a separate earth conductor and specifies impedance requirements.

REMOTE Interface Pinout

REMOTE Interface X1 Pinout

Details the pin assignments, names, and descriptions for the 15-pole Sub-D female REMOTE interface.

Relay Status and Operation

Relay Status and Output Data

Explains how relay status and output data correlate with different operating modes and error conditions.

Operation Overview

4.1 Media Compatibility; Purge Gas

Discusses suitability of media for pumping and recommendations for using purge gas.

4.2 Interfaces

Lists available interfaces (USB, REMOTE, Anybus) for TURBOVAC i(X) and their control hierarchy.

Applications via Serial Interface

Applications via Serial Interface

Details applications implementable via serial interface and their benefits, including networking, automation, and troubleshooting.

Switching On the Pump

4.3 Switching On

Provides instructions for switching on the turbomolecular pump, including pre-start checks and start commands.

Starting Pressure Determination

Explains how to determine starting pressure using a graph based on pump speed and chamber volume.

Shutting Down the Pump

4.4 Shutting Down

Details procedures for shutting down the pump, including generator operation and venting considerations.

Venting Procedures

4.5 Venting

Explains different venting methods and guidelines for safe venting, including pressure rise limits.

Bakeout and Storage Procedures

4.6 Bakeout

Provides instructions for baking out TURBOVACs with CF flanges, including heat radiation protection.

4.7 Operation after Longer Storage

Outlines the procedure for conditioning bearings after extended storage periods (over 12 months or 3 years).

Removing Pump from System

4.8 Removing the Pump from the System

Instructions for safely removing the pump from the system, including precautions for hazardous gases and proper packing.

Maintenance Procedures

5 Maintenance

Covers bearing replacement, purge gas filter, adsorption trap, and cleaning procedures.

5.1 Cleaning

Instructions for cleaning the turbomolecular pump with a dry cloth and servicing the frequency converter.

5.2 Leybold Service

Details requirements for sending equipment for service, including contamination statements.

Bearing Monitoring and Conditioning

5.3 Bearing Monitoring and Conditioning

Explains the integrated system for managing bearing condition, indicated by a blue LED.

Bearing Run in Mode (BRIM)

Describes the BRIM start-up sequence designed to precondition bearings for optimal life.

BRIM Process and Bearing LED

BRIM Process Control

Details how to trigger and manage the BRIM process, including warnings about cancellation.

Bearing LED Status

Explains the meaning of different states of the bearing LED for conditioning and replacement status.

Troubleshooting Guide

Pre-Troubleshooting Checks

Lists simple checks for connections, power supply, and forevacuum pressure before troubleshooting.

Error Reset and Reading

Instructions on how to reset error messages and read error codes via serial interface.

Yellow Power LED Issues

Identifies causes (no/wrong DC power, converter defect) and remedies for a non-lit yellow power LED.

Red LED Flashes

Explains that red LED flashes indicate warning messages, allowing continued operation within limits.

Pump Start;Error LED Issues

Addresses issues with pump start-up and ERROR LED, covering protocol errors and remote connection problems.

Noise and Vibration Issues

Identifies causes (rotor imbalance, defective bearing) and remedies for loud running noises and vibrations.

Further Troubleshooting Scenarios

Troubleshooting Pump Overload

Addresses pump overload due to high forevacuum pressure, gas flow, or cooling issues.

Troubleshooting Pressure Issues

Covers issues with reaching ultimate pressure, relating to measurement sensors, leaks, or pump condition.

Troubleshooting Pump Stop Issues

Addresses problems with stopping the pump via X1 interface and incorrect parameter settings.

Troubleshooting Accessory Issues

Covers issues with connected accessories not operating as intended due to connection or function code errors.

Waste Disposal Guidelines

7 Waste Disposal

Provides guidelines for decontaminating and disposing of contaminated equipment and parts.

Certifications

Certificates

Lists certifications and testing standards met by the TURBOVAC i, including UL and CSA compliance.

EU Declaration of Conformity

EU Declaration of Conformity

Declares conformity with European CE legislation, including Machinery, EMC, and RoHS directives.

EU Declaration Signatories

EU Declaration of Conformity Signatories

Lists signatories and dates for the EU Declaration of Conformity.

UK Declaration of Conformity

UK Declaration of Conformity

Declares conformity with relevant UK statutory requirements, including safety and EMC regulations.

UK Declaration Signatories

UK Declaration of Conformity Signatories

Lists signatories and dates for the UK Declaration of Conformity.

Additional Compliance Information

Additional Legislation and Compliance

Details RoHS exemptions, REACH compliance, and China Material Content Declaration requirements.