Installation
41300855170_002_C8 - 08/2021 - © Leybold
old) and parameter 647[2] (lower switching threshold). For this refer to the
interface Operating Instructions.
Either connect a power failure venting valve electrically separately or connect
it to X201, X202 or X203 and thereafter change the function for the accesso-
ry connection. For this refer to the interface Operating Instructions.
3.8 Connect purge gas
When having to decide which gases need or not need to be pumped with
purge gas we are available to provide assistance.
Refer to Section 4.1 for suited gases.
Consider the additional purge gas flow when selecting a suitable backing
pump.
We recommend a purge gas flow of 0.4 mbar·l/s (24 sccm) with Nitrogen.
The pressure in the pump must not exceed 1400 mbar (0.4 bar over-
pressure).
The purge gas is fed either through an activated valve or a manually operated
throttle.
Purge gas connection with purge gas valve
Unscrew and remove the locking screw and the gasket from the purge gas
connection of the TURBOVAC.
Screw in the purge gas valve and the gasket into the thread.
Connect the purge gas supply at the valve’s inlet (G1/8“).
Either connect the purge gas valve electrically separately or connect it to an
accessory connection and thereafter change the function for the accessory
connection. For this refer to the interface Operating Instructions.
CAUTION
Ventil
800120V0012
800120V0013
800120V0022
Sperrgasdrossel G1/8"
800120V0014
Luftfilter
800110V0022
Fig. 3.13 Fitting valve
Valve
800120V0112
800120V0113
800120V0122
Air filter
800110V0022
Purge gas throttle G1/8"
800120V0014
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