Description
8 300855170_002_C8 - 08/2021 - © Leybold
1 Description
The TURBOVAC 850 i(X), 950 i(X), 1350 i and 1450 i are turbomolecular
pumps designed to evacuate vacuum chambers down to pressure levels in
the high vacuum and ultra-high vacuum range.
They are suitable for pumping air and clean gases. A forevacuum pump and
a power supply are required for their operation.
Fig. 1.1 TURBOVAC models
TURBOVAC 850 i
DN 160 ISO-K
TURBOVAC 850 i
DN 160 CF
TURBOVAC 950 i
DN 200 ISO-K
TURBOVAC 950 i
DN 200 CF
TURBOVAC 850 iX
TURBOVAC 850 i
with optional interface
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