Contents
2 300855170_002_C8 - 08/2021 - © Leybold
Page
0 Important Safety Information 5
Safety symbols 5
0.1 Mechanical hazards 6
0.2 Electrical hazards 7
0.3 Thermal hazards 7
0.4 Danger through materials and substances 7
0.5 Dangers in connection with safety-related
measures and precautions 7
1 Description 8
1.1 Design 10
1.2 Standard equipment 10
1.3 Technical data 11
1.3.1 Technical data for the integrated drive electronics 12
1.3.2 Pumping speed curves 13
1.3.3 Operation diagrams 15
1.4 Ordering data 19
2 Transport and storing 23
3 Installation 24
3.1 Conforming utilization 24
3.1.1 Non-conforming utilization 24
3.2 Operating environment 25
3.3 Fitting accessories 26
3.4 Attach the pump to the vacuum chamber 27
3.5 Forevacuum connection 35
3.6 Connect the cooling 36
3.6.1 Air cooling 36
3.6.2 Water cooling 37
3.6.3 Water quality 38
3.7 Connect a power failure venting valve or a venting valve 40
3.8 Connect purge gas 41
3.9 Connect a flange heater 42
3.10 Connect a vacuum gauge head (only for TURBOVAC iX) 43
3.11 Electrical connection 44
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