Installation
35300855170_002_C8 - 08/2021 - © Leybold
3.5 Forevacuum connection
Connect the clean forevacuum line with the small flange connectors and take
care not to constrict the forevacuum flange’s diameter.
Ensure that the pump is sufficiently isolated against vibrations generated by
the forevacuum pump.
No forces from the piping system may be allowed to affect the turbomolecu-
lar pump. Support the piping correspondingly or decouple through flexible
joints.
Do not use the pump with a backing pressure below 5 x 10
-4
mbar. Lower
backing pressures will increase the evaporation rate of the lubrication
reducing the bearing life.
The forevacuum line must be tight. Hazardous gases can escape at leaks
or the gases being pumped can react with air or humidity.
Observe Safety Information 0.4.
Only for TURBOVAC i
The forevacuum pump can be energised at the accessories connection of
the TURBOVAC via the relay box.
Only for TURBOVAC iX
A forevacuum pump may be electrically connected through the relay box to
accessory connection X202 on the TURBOVAC iX.
The relay box switches the forevacuum pump on when a start command is
present for the turbomolecular pump, and the relay box switches the forevac-
uum pump off when the start command is revoked.
Through parameter 643[1] the switch-on delay time and through parameter
644[1] a shutdown delay time in seconds can be set up (the default for both
parameters is 0).
NOTICE
WARNING
To Next Page
Loading...
Need help?
General
