Description
10 300855170_002_C8 - 08/2021 - © Leybold
1.1 Design
The TURBOVAC models are wide-range TMPs equipped with an additional
Holweck stage.
With the built-in frequency converter as the electronic drive the TURBOVAC
forms one single unit. The electonic drive governs the pump’s speed and
serves as a monitor for all functions of the pump. Moreover, the TURBOVAC
iX is equipped with an integrated vacuum system controller for connection
and operation of various accessory components.
At the high vacuum side the bearing is of a non-wearing permanent magnetic
bearing type, at the forevacuum side a lifetime lubricated oil-free ceramic ball
bearing is used.
Water cooling or an air cooling fan is available for the TURBOVAC 850 i and
950 i as optional equipment. The TURBOVAC 1350 i and 1450 i are water-
cooled as standard.
The intake flange should be fitted with a wire mesh inlet screen to protect the
pump against mechanical damage caused by foreign objects.
The pumps are equipped with a venting and a purge gas facility. The connec-
tions are blanked off by default with G1/8” closure screws.
Venting and purge gas valves, or a venting screw, or a pressure regulator can
be connected directly to the pump.
1.2 Standard equipment
Turbomolecular pump with integrated electronic drive unit, two eye-bolts
High and fore-vacuum flanges are protective-capped.
Flange mounting elements and the inlet screen are not enclosed, but are
available as accessories.
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