Description
11300855170_002_C8 - 08/2021 - © Leybold
1.3 Technical data
TURBOVAC 850 i(X) 950 i(X) 1350 i 1450 i
High-vacuum connection
DN 160 ISO-K
160 CF
200 ISO-K
200 CF
200 ISO-K
200 ISO-F
250 ISO-K
250 ISO-F
Forevacuum connection
DN 25 KF 25 KF 40 KF 40 KF
Pumping speed*
N
2
Ar
He
H
2
I · s
-1
720
655
850
755
900
840
925
770
1250
1150
1350
1150
1380
1280
1390
1210
Gas throughput*
N
2
Ar
He
H
2
mbar · I · s
-1
14
3.5
21
> 15
> 24**
12
18
10
Compression ratio*
N
2
Ar
He
H
2
> 1·10
11
> 1·10
11
1.3·10
8
4.4·10
6
> 1·10
8
> 1·10
8
4·10
5
2·10
4
Ultimate pressure with 2-stage oil-sealed rotary
vane pump ISO-K, ISO-F / CF
mbar 3·10
-8
/ 3·10
-10
< 7.5·10
-9
Max. permissible
forevacuum pressure for N
2
mbar 15 15 4 4
Operating speed
min
-1
49 200 49 200 42 000 42 000
Minimum speed
min
-1
30 000 30 000 23 100 23 100
Run-up time, approx.
min 2.5 2.5 2.5 2.5
Max. power consumption
W 500 (default).
600 (max.)
500 (default).
600 (max.)
600 (default).
800 (max.)
600 (default).
800 (max.)
Power consumption at ultimate pressure W 40 40 50 50
Type of protection
for versions with optional interface
Type1 (UL 50E)
IP
40
54
1
Ambient temperature
during operation
storage
°C
+5 bis +40
1)
-15 bis +70
Cooling standard
Convection
1)
Convection
1)
Water Water
Cooling optional
Air or water
1)
Air or water
1)
− −
Cooling water connection
plug connection for 6x1 hose /
alternatively G 1/8-in. screw-in thread
Cooling water consumption
l/h 60
Permissible cooling water pressure
(
bar(g): bar (gauge) is overpressure,
i.e. atmospheric pressure = 0 bar(g))
bar(g) 6
Permissible cooling water temperature
°C 15 to 35
* Please contact us when using Argon or other “heavy” gases as process gas.
** For a high gas throughput with N
2
please contact Leybold.
1) Depending on the ambient temperature, the gas throughput and the type of gas, forced air cooling or water cooling may be necessary.
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