Operation
49300855170_002_C8 - 08/2021 - © Leybold
4 Operation
4.1 Media compatibility / purge gas
The TURBOVAC integra is suitable for pumping air and clean gases.
If reactive gases in low concentrations must be pumped operate the pump
with purge gas.
We would be glad to consult with you as regards the media which can safely
be handled with this unit.
Install a micropore filter when pumping media which contains dust.
Suited for venting or purging are all gases,
■
which will not cause corrosion or pitting in aluminium and steel and
■
which in connection with process deposits in the pump will not cause cor-
rosion or sticking.
For venting and as the purge gas we recommend inert gases like nitrogen or
argon. The temperature of these gases should be between 5 °C and 80 °C,
max. relative humidity should not exceed 10 ppm.
The gas must be clean.
In individual cases and after consultation also dry, filtered, oil-free air or filte-
red ambient air may be used (filter mesh < 1µm).
Change the filters after some time, at least annually.
4.2
Interfaces
The TURBOVAC i(X) is always equipped with the following interfaces for
customers:
■
USB (COM port) (X106)
■
REMOTE (X1)
Moreover, some models are equipped with an Anybus interface which in turn
may be equipped with different interfaces like a RS 485, for example.
The control hierarchy is as follows: Anybus interface → USB → REMOTE
(X1). See also parameter 179.
The frequency converter is configured through the parameters according to
the parameter list. Pxxx denotes parameter value xxx.
The PC software LEYASSIST can be used for the configuration of the pump
and accessories and for data logging. The tool is available for download free
of charge on our website.
www.leybold.com → Media → Downloads → Download Software →
PC Software for Turbomolecular Pumps
Operating Instructions 300450826 Serial Interfaces for TURBOVAC i/IX offer a
detailed description of the interfaces RS 232, RS 485, Profibus and USB of
the TURBOVAC.
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