LEYBOLD TURBOVAC i(X) - Pumping Speed Curves; TURBOVAC 850 i Pumping Speed; TURBOVAC 950 i Pumping Speed

Description
13300855170_002_C8 - 08/2021 - © Leybold
0
200
400
600
800
1.000
10
-6
Pumping speed
Inlet pressure
10
-5
10
-4
10
-3
10
-2
10
-1
1
l/s
mbar
TURBOVAC 850 i
Helium
Hydrogen
Nitrogen
Argon
Fig. 1.3 Pumping speed curves for the TURBOVAC 850 i
1.3.2 Pumping speed curves
0
200
400
600
800
1.000
10
-6
Pumping speed
Inlet pressure
10
-5
10
-4
10
-3
10
-2
10
-1
1
l/s
mbar
TURBOVAC 950 i
Helium
Hydrogen
Nitrogen
Argon
Fig. 1.4 Pumping speed curves for the TURBOVAC 950 i