Installation
42 300855170_002_C8 - 08/2021 - © Leybold
Purge gas connection with purge gas throttle
Unscrew and remove the locking screw and the gasket from the purge gas
connection of the pump.
Then screw in the throttle and the gasket into the thread.
3.9 Connect a flange heater
Only for TURBOVACs with CF flange
If pressures in the range of 10
-8
mbar or below are to be devel oped, the vac-
uum chamber and the components installed therein will have to be baked
out. In addition, the TURBOVAC can be baked out using the flange heater
provided for this purpose.
With the aid of the relay box the heating jacket can be driven directly via the
turbopump. For this connect the heating jacket to the relay box and insert
the connection cable of the relay box at the accessory connection (X201 for
the TURBOVAC iX) and screw it down.
The accessory connection has been so pre-configured that the heating jacket
will heat as long as the turbomolecular pump is running. To change this set-
ting, refer to the interface Operating Instructions.
Alternatively the heating jacket may be connected through the corresponding
mains power cable to the power supply.
Information on baking out is also given in Section 4.6.
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