Operation
54 300855170_002_C8 - 08/2021 - © Leybold
4.6 Bakeout
Only for TURBOVACs with CF flange, see also Section 3.9.
If pressures in the range of 10
-8
mbar or below are to be devel oped, the vac-
uum chamber and the components installed therein will have to be baked
out. In addition, the TURBOVAC can be baked out using the flange heater
provided for this purpose.
Protect the rotor against intensive, direct heat radiation. When baking out at
the forevacuum side – at a sorption trap, for example – ensure that the com-
ponents attached direct are not heated to more than 100°C (212 °F).
Operate the pump with water cooling when baking out.
4.7 Operation after a longer storage period
For pumps that have been stored for more than 12 months, a ball bear-
ing run-in procedure for smooth ball bearing running must be carried out
when putting into operation again. The procedure differs according to the
firmware version of the pump, see the following sections.
To do this, set parameter P119 [0] to the value 1 using a serial interface and
save the parameter change with parameter P8. Then start the pump.
This process takes approx. 4.3 hours, the red LED will flash during this time.
The TURBOVAC may be operated only with low gas throughput during this
time.
At the end, the pump accelerates to the nominal speed and parameter P 119
[0] is written to 0 by the electronics.
For pumps that have been stored for more than 3 years, we recommend
a preventive exchange of the ball bearings, see Section 5 Bearing replace-
ment.
NOTICE
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